A Low-Cost Ion Assisted Evaporation Technique for...

A Low-Cost Ion Assisted Evaporation Technique for AuGe/n-GaAs Contact Fabrication

B. Thomas, M. W. Ahktar, D. V. Morgan, M. A. Mohammed, D. E. Davies
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Volume:
120
Year:
1990
Language:
english
Pages:
1
DOI:
10.1002/pssa.2211200136
File:
PDF, 258 KB
english, 1990
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