Flash Lamp Annealing and RF Plasma Annealing of AlSiO2Si Structures
A. N. Nazarov, V. S. Lysenko, S. A. Valiev, M. M. Lokshin, A. S. Tkachenko, I. A. KunitskiiVolume:
120
Year:
1990
Language:
english
Pages:
10
DOI:
10.1002/pssa.2211200217
File:
PDF, 574 KB
english, 1990