Radio-Frequency Plasma Treatment and Thermal Annealing in Implanted Si Raman Study
V. V. Artamonov, V. S. Lysenko, A. N. Nazarov, B. D. Nechiporuk, V. V. Strelchuk, M. Ya. ValakhVolume:
120
Year:
1990
Language:
english
Pages:
10
DOI:
10.1002/pssa.2211200220
File:
PDF, 586 KB
english, 1990