Thermal Nitridation of SiO2 Thin Films in NH3 + H2O (or O2) Mixtures
J. C. Bureau, A. Glachant, B. BallandVolume:
120
Year:
1990
Language:
english
Pages:
11
DOI:
10.1002/pssa.2211200223
File:
PDF, 610 KB
english, 1990