Thermal Nitridation of SiO2 Thin Films in NH3 + H2O (or O2)...

Thermal Nitridation of SiO2 Thin Films in NH3 + H2O (or O2) Mixtures

J. C. Bureau, A. Glachant, B. Balland
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Volume:
120
Year:
1990
Language:
english
Pages:
11
DOI:
10.1002/pssa.2211200223
File:
PDF, 610 KB
english, 1990
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