High Quality Hydrogenated Amorphous Silicon Carbon Layers as Obtained by a Particular Photochemical Vapor Deposition Method
C. Manfredotti, F. Fizzotti, C. Osenga, G. Amato, L. BoarinoVolume:
135
Year:
1993
Language:
english
Pages:
8
DOI:
10.1002/pssa.2211350115
File:
PDF, 474 KB
english, 1993