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Atomic Hydrogen Regeneration and Defect Passivation in Hydrogenated Silicon under Neutron Irradiation
V. V. Bolotov, V. M. Emeksuzyan, G. L. Plotnikov, K. SchmalzVolume:
137
Year:
1993
Language:
english
Pages:
8
DOI:
10.1002/pssa.2211370104
File:
PDF, 436 KB
english, 1993