Formation of Shallow p+ -n Junctions by B+ Implantation...

physica status solidi (a) 1993 Vol. 137; Iss. 1

Formation of Shallow p+ -n Junctions by B+ Implantation through a TiSi2 Screen Film

Xi-Mao Bao, Hai Yan, Bao-Hua Mao
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Volume:
137
Year:
1993
Language:
english
Pages:
1
DOI:
10.1002/pssa.2211370131
File:
PDF, 278 KB
english, 1993
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