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X-Ray Investigations of Dislocations in an Implanted Si Crystal Induced by Pulsed Laser Annealing
J. Auleytner, M. Skorokhod, L. Datsenko, V. Khrupa, A. BriginetsVolume:
147
Year:
1995
Language:
english
Pages:
1
DOI:
10.1002/pssa.2211470237
File:
PDF, 214 KB
english, 1995