PI Controller for Electron Density Control in Low Pressure Plasma
Zhang, Y., Keville, B., Gaman, C., Holohan, A., Daniels, S.Volume:
45
Year:
2012
Language:
english
Journal:
IFAC Proceedings Volumes
DOI:
10.3182/20120328-3-it-3014.00058
File:
PDF, 3.12 MB
english, 2012