Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2016 / 08 Vol. 381
Influence of N2 partial pressure on structural and microhardness properties of TiN/ZrN multilayers deposited by Ar/N2 vacuum arc discharge
Naddaf, M., Abdallah, B., Ahmad, M., A-Kharroub, M.Volume:
381
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2016.05.029
Date:
August, 2016
File:
PDF, 894 KB
english, 2016