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The effect of annealing on the structural, optical and electrical properties of Titanium Nitride (TiN) thin films prepared by DC magnetron sputtering with supported discharge
Kavitha, A., Kannan, R., Sreedhara Reddy, P., Rajashabala, S.Volume:
27
Language:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-016-5130-0
Date:
October, 2016
File:
PDF, 1.35 MB
english, 2016