Nondestructive measurement of the evolution of...

Nano Letters 2016 / 06

Nondestructive measurement of the evolution of layer-specific mechanical properties in sub-10 nm bilayer films

Hoogeboom-Pot, Kathleen M., Turgut, Emrah, Hernandez-Charpak, Jorge N., Shaw, Justin M., Kapteyn, Henry C., Murnane, Margaret M, Nardi, Damiano
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Language:
english
Journal:
Nano Letters
DOI:
10.1021/acs.nanolett.6b00606
Date:
June, 2016
File:
PDF, 811 KB
english, 2016
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