Stability of reactive DC-sputtered Ir and IrO...

Integrated Ferroelectrics 1997 / 04 Vol. 16; Iss. 1-4

Stability of reactive DC-sputtered Ir and IrO 2 thin films in various ambients

Chen, Tung-Sheng, Balu, Venkatasubramani, Jiang, Bo, Kuah, Shao-Hong, Lee, Jack C., Chu, Peir, Jones, Robert E., Zurcher, Peter, Taylor, Deborah J., Gillespie, Sherry
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Volume:
16
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584589708013041
Date:
April, 1997
File:
PDF, 659 KB
english, 1997
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