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Design and Modeling of an Efficiency Horizontal Thermal Micro-Actuator with Integrated Piezoresistors for Precise Control
Zhang, Yan, Lee, Dong-WeonVolume:
10
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2010.2269
Date:
May, 2010
File:
PDF, 295 KB
english, 2010