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Influence of Oxide Processing on the Defects at the SiC-SiO2 Interface Measured by Electrically Detected Magnetic Resonance
Gruber, Gernot, Aichinger, Thomas, Pobegen, Gregor, Peters, Dethard, Koch, Markus, Hadley, PeterVolume:
858
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.858.643
Date:
May, 2016
File:
PDF, 352 KB
english, 2016