Pressure related defect engineering in...

Pressure related defect engineering in silicon-on-insulator-like structures produced by either oxygen or nitrogen ion implantation

I. V. Antonova
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Volume:
244
Year:
2007
Language:
english
Pages:
5
DOI:
10.1002/pssb.200672536
File:
PDF, 197 KB
english, 2007
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