Fabrication of PZT films on SI substrates by SOL-GEL method...

Integrated Ferroelectrics 2001 / 01 Vol. 33; Iss. 1-4

Fabrication of PZT films on SI substrates by SOL-GEL method using Y 2 O 3 buffer layers

Park, Byung-Eun, Ishiwara, H.
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Volume:
33
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580108222293
Date:
January, 2001
File:
PDF, 613 KB
english, 2001
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