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SPIE Proceedings [SPIE SPIE NanoScience + Engineering - San Diego, California, United States (Sunday 25 August 2013)] Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII - Nanomanufacturing concerns about measurements made in the SEM I: imaging and its measurement
Postek, Michael T., Vladár, András E., Postek, Michael T., Orji, Ndubuisi GeorgeVolume:
8819
Year:
2013
Language:
english
DOI:
10.1117/12.2025578
File:
PDF, 1.06 MB
english, 2013