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Synthesis and Performance of Colloidal Silica Nano-Abrasives with Controllable Size for Chemical Mechanical Planarization
Zhang, K. L., Song, Z. T., Wang, F., Wang, L. Y., Feng, S. L.Volume:
9
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2009.c086
Date:
February, 2009
File:
PDF, 2.64 MB
english, 2009