High-Aspect-Ratio Structure Fabrication on (110)-Oriented...

Journal of Nanoscience and Nanotechnology 2010 / 04 Vol. 10; Iss. 4

High-Aspect-Ratio Structure Fabrication on (110)-Oriented Silicon Surfaces Using Tribo-Nanolithography

Kawasegi, Noritaka, Morita, Noboru
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Volume:
10
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2010.2158
Date:
April, 2010
File:
PDF, 1.92 MB
english, 2010
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