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XY Parallel Compliant Stage with Compact Configuration
Choi, Kee-Bong, Lee, Jae Jong, Kim, Gee Hong, Lim, Hyung JunVolume:
12
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2012.6262
Date:
July, 2012
File:
PDF, 2.72 MB
english, 2012