Effects of rapid thermal treatments on Ti/TiN/Si structures for electrical contacts on silicon
Pérez-Rigueiro, J., Fernández, M., Jimenez, C., Pérez-Casero, R., Martínez-Duart, J. M.Volume:
11
Language:
english
Journal:
Materials Science and Technology
DOI:
10.1179/mst.1995.11.11.1210
Date:
November, 1995
File:
PDF, 862 KB
english, 1995