A conductivity-based selective etching for next generation GaN devices
Yu Zhang, Sang-Wan Ryu, Chris Yerino, Benjamin Leung, Qian Sun, Qinghai Song, Hui Cao, Jung HanVolume:
247
Year:
2010
Language:
english
Pages:
4
DOI:
10.1002/pssb.200983650
File:
PDF, 324 KB
english, 2010