Comparison of dimethylzinc and diethylzinc as precursors for monocrystalline zinc oxide grown by atomic layer deposition method
L. Wachnicki, M. Lukasiewicz, B. Witkowski, T. Krajewski, G. Luka, K. Kopalko, R. Minikayev, E. Przezdziecka, J. Z. Domagala, M. Godlewski, E. GuziewiczVolume:
247
Year:
2010
Language:
english
Pages:
3
DOI:
10.1002/pssb.200983687
File:
PDF, 300 KB
english, 2010