[IEEE 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - Beijing, China (Oct. 18-21, 2004)] Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - Experimental investigation of the annealing process for self-aligned DSOI MOSFET
Wang Jian,, Zhichao, L., Lin Xi,, Dong Yemin,, Tian Lilin,Volume:
1
Year:
2004
Language:
english
DOI:
10.1109/icsict.2004.1435006
File:
PDF, 689 KB
english, 2004