Micromachined Frequency-Output Force Probes
Mahdavi, Mohammad, Abbasalipour, Amin, Ramezany, Alireza, Pourkamali, SiavashYear:
2016
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/jsen.2016.2572604
File:
PDF, 2.82 MB
english, 2016