SPIE Proceedings [SPIE 15th Annual BACUS Symposium on Photomask Technology and Management '95 - Santa Clara, CA (Wednesday 20 September 1995)] 15th Annual BACUS Symposium on Photomask Technology and Management - Manufacturing and inspection of OPC and PSM masks
Staud, Wolfgang, Huang, Karen, Beard, Patricia D., Hebron, Ofer, Eran, Yair, Shelden, Gilbert V., Wiley, James N.Volume:
2621
Year:
1995
Language:
english
DOI:
10.1117/12.228214
File:
PDF, 1.51 MB
english, 1995