SPIE Proceedings [SPIE 15th Annual BACUS Symposium on...

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SPIE Proceedings [SPIE 15th Annual BACUS Symposium on Photomask Technology and Management '95 - Santa Clara, CA (Wednesday 20 September 1995)] 15th Annual BACUS Symposium on Photomask Technology and Management - Manufacturing and inspection of OPC and PSM masks

Staud, Wolfgang, Huang, Karen, Beard, Patricia D., Hebron, Ofer, Eran, Yair, Shelden, Gilbert V., Wiley, James N.
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Volume:
2621
Year:
1995
Language:
english
DOI:
10.1117/12.228214
File:
PDF, 1.51 MB
english, 1995
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