SPIE Proceedings [SPIE Photonics East (ISAM, VVDC, IEMB) - Boston, MA (Sunday 1 November 1998)] Three-Dimensional Imaging, Optical Metrology, and Inspection IV - Simultaneous measurement of the root-mean-square roughness and autocorrelation length by optical method
Kim, Dalwoo, Oh, Ki-Jang, Lim, Choong-Soo, Harding, Kevin G., Svetkoff, Donald J., Creath, Katherine, Harris, James S.Volume:
3520
Year:
1998
Language:
english
DOI:
10.1117/12.334343
File:
PDF, 231 KB
english, 1998