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SPIE Proceedings [SPIE Design, Test, and Microfabrication of MEMS/MOEMS - Paris, France (Tuesday 30 March 1999)] Design, Test, and Microfabrication of MEMS and MOEMS - Optical switch driven by giant magnetostrictive thin films
Moon, Sung W., Lim, Sang H., Lee, Sang Bae, Kang, HoKwan, Kim, Min C., Han, Seok H., Oh, Myung-Hwan, Courtois, Bernard, Crary, Selden B., Ehrfeld, Wolfgang, Fujita, Hiroyuki, Karam, Jean Michel, MarkuVolume:
3680
Year:
1999
Language:
english
DOI:
10.1117/12.341283
File:
PDF, 1.80 MB
english, 1999