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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachined Devices and Components VI - Development of silicon ultrasonic transducer using micromachining
Caliano, Giosue, Galanello, Fabio, Foglietti, Vittorio, Cianci, Elena, Caronti, Alessandro, Peeters, Eric, Paul, OliverVolume:
4176
Year:
2000
Language:
english
DOI:
10.1117/12.395636
File:
PDF, 1.68 MB
english, 2000