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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] Micromachining and Microfabrication Process Technology VII - Design and fabrication of micromachined microwave transmission lines
Shi, Yanling, Lai, Zongsheng, Xin, Peisheng, Shao, Li, Zhu, Ziqiang, Karam, Jean Michel, Yasaitis, John A.Volume:
4557
Year:
2001
DOI:
10.1117/12.442983
File:
PDF, 377 KB
2001