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SPIE Proceedings [SPIE SPIE Optics + Photonics - San Diego, California, USA (Sunday 13 August 2006)] Interferometry XIII: Applications - High-speed high-accuracy fiber optic low-coherence interferometry for in situ grinding and etching process monitoring
Walecki, Wojciech J., Pravdivtsev, Alexander, Santos II, Manuel, Koo, AnnVolume:
6293
Year:
2006
Language:
english
DOI:
10.1117/12.675592
File:
PDF, 187 KB
english, 2006