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SPIE Proceedings [SPIE Photonics and Optoelectronics Meetings 2009 - Wuhan, China (Saturday 8 August 2009)] Photonics and Optoelectronics Meetings (POEM) 2009: Solar Cells, Solid State Lighting, and Information Display Technologies - ICP etching of high Al mole fraction AlGaN
Meng, Zhao, Grätzel, Michael, Amano, Hiroshi, Yu, Libo, Li, Xiao, Chen, Chin Hsin, Chen, Changqing, Liu, Qibin, Duan, Huiqiang, Wang, Peng, Yu, Chenhui, Chen, ChangqingVolume:
7518
Year:
2009
Language:
english
DOI:
10.1117/12.841195
File:
PDF, 363 KB
english, 2009