SPIE Proceedings [SPIE International Conference on Optical Instrumentation and Technology - Shanghai, China (Monday 19 October 2009)] 2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications - Analysis and modeling of thermal failure based on a MEMS thermally driven structure
Zhou, Zhaoying, Li, Xiuhan, Yuan, Quan, Fukuda, Toshio, Seidel, Helmut, Lang, Leijie, Liu, Jian, Li, Xinxin, Zhang, Haixia, Liu, Yu, Fang, Dongming, Cui, Tianhong, Zhang, HaixiaVolume:
7510
Year:
2009
Language:
english
DOI:
10.1117/12.845904
File:
PDF, 1.34 MB
english, 2009