Optical and Structural Features of Silicon-Rich...

Journal of Nanoscience and Nanotechnology 2011 / 12 Vol. 11; Iss. 12

Optical and Structural Features of Silicon-Rich Hydrogenated Amorphous Silicon Nitride Thin Films

Singh, Sarab Preet, Otón, Claudio J., Srivastava, P., Ghosh, Santanu, Prakash, G. Vijaya
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Volume:
11
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2011.4091
Date:
December, 2011
File:
PDF, 2.59 MB
english, 2011
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