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Superhard Nanocrystalline Titanium Nitride Films Formed by Inductively Coupled Plasma-Assisted Sputtering
Chun, Sung-YongVolume:
11
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2011.4794
Date:
August, 2011
File:
PDF, 2.44 MB
english, 2011