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Study of Nanocrystalline Silicon Films Synthesized Below 100 °C by Catalytic Chemical Vapor Deposition
Song, Tae-Ho, Keum, Ki-Su, Hong, Wan-ShickVolume:
13
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2013.7879
Date:
November, 2013
File:
PDF, 3.81 MB
english, 2013