Investigation of Top/Bottom Electrode and Diffusion Barrier...

Ferroelectrics 2008 / 10 Vol. 367; Iss. 1

Investigation of Top/Bottom Electrode and Diffusion Barrier Layer for PZT Thick Film MEMS Sensors

Hindrichsen, C. C., Pedersen, T., Thomsen, E. V., Hansen, K., Lou-M⊘ller, R.
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Volume:
367
Language:
english
Journal:
Ferroelectrics
DOI:
10.1080/00150190802375441
Date:
October, 2008
File:
PDF, 4.70 MB
english, 2008
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