Multi-step ART1 algorithm for recognition of defect patterns on semiconductor wafers
Choi, Gyunghyun, Kim, Sung-Hee, Ha, Chunghun, Bae, Suk JooVolume:
50
Language:
english
Journal:
International Journal of Production Research
DOI:
10.1080/00207543.2011.574502
Date:
June, 2012
File:
PDF, 1.68 MB
english, 2012