Tilted angle ion implantation

Radiation Effects and Defects in Solids 1988 / 4 Vol. 106; Iss. 3

Tilted angle ion implantation

Fink, D., Bffirsack, J. P., Kranz, H., De Souza, J., Behar, M., Zawislak, F. C.
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Volume:
106
Language:
english
Journal:
Radiation Effects and Defects in Solids
DOI:
10.1080/00337578808225699
Date:
April, 1988
File:
PDF, 964 KB
english, 1988
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