The effects of PECVD silicon dioxide passivation on the...

Integrated Ferroelectrics 1994 / 03 Vol. 4; Iss. 2

The effects of PECVD silicon dioxide passivation on the electrical characteristics of Sol-Gel deposited PZT film capacitors

Rod, Bernard J., McCullen, Judith, Moore, Randall A., Terrell, Jonathan
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Volume:
4
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584589408018670
Date:
March, 1994
File:
PDF, 838 KB
english, 1994
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