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[IEEE 2015 IEEE 12th International Conference on Group IV Photonics (GFP) - Vancouver, BC, Canada (2015.8.26-2015.8.28)] 2015 IEEE 12th International Conference on Group IV Photonics (GFP) - Design rules to control the tensile strain in Ge μ-membranes fabricated from GeOI substrates for photonics applications
Dias, G. O., Rouchon, D., Widiez, J., Hartmann, J.M., Fowler, D., Chelnokov, A., Reboud, V., Gassenq, A., Tardif, S., Guiloy, K., Pauc, N., Escalante, J., Duchemin, I., Niquet, Y-M., Rieutord, F., CalYear:
2015
Language:
english
DOI:
10.1109/group4.2015.7305988
File:
PDF, 387 KB
english, 2015