[IEEE 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - Beijing, China (Oct. 18-21, 2004)] Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - Effect of the implantation of fluorine on the mobility of channel electron for partially depleted SOI nMOSFET
Zhong-Shan Zheng,, Zhong-Li Liu,, Guo-Qiang Zhang,, Ning Li,, Kai Fan,Volume:
1
Year:
2004
Language:
english
DOI:
10.1109/icsict.2004.1435005
File:
PDF, 474 KB
english, 2004