[IEEE 2015 IEEE International Conference on Industrial Engineering and Engineering Management (IEEM) - Singapore, Singapore (2015.12.6-2015.12.9)] 2015 IEEE International Conference on Industrial Engineering and Engineering Management (IEEM) - Dynamic scheduling of Diffusion Furnace in Semiconductor Manufacturing with real time events
Vimala Rani, M., Mathirajan, M.Year:
2015
Language:
english
DOI:
10.1109/ieem.2015.7385617
File:
PDF, 1.77 MB
english, 2015