[IEEE Proceedings of the 2002 14th International Conference on Ion Implantation Technology - Taos, New Mexico, USA (2002.9.22-2002.9.27)] Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on - Investigation of indium activation by SRP and SIMS for sub-0.1 μm retrograde channels
Suvkhanov, A., Mirabedini, M., Hornback, V.Year:
2002
Language:
english
DOI:
10.1109/iit.2002.1257930
File:
PDF, 585 KB
english, 2002