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[IEEE 2006 IEEE International Symposium on the Applications of Ferroelectrics - Sunset Beach, NC, USA (2006.07.30-2006.08.3)] 2006 IEEE International Symposium on the Applications of Ferroelectrics - Atomic Layer Deposition of Pb(Zr,Ti)Ox, Thin Films by a Combination of Binary Atomic Layer Deposition Processes

Watanabe, Takayuki, Hoffmann-Eifert, Susanne, Waser, Rainer, Hwang, Cheol Seong
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Year:
2006
Language:
english
DOI:
10.1109/isaf.2006.4349293
File:
PDF, 1.40 MB
english, 2006
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