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[IEEE 2014 International Symposium on Optomechatronic Technologies (ISOT) - Seattle, WA (2014.11.5-2014.11.7)] 2014 International Symposium on Optomechatronic Technologies - Interferometry and Atomic Force Microscopy of Substrates for Optoelectronics Proceeded by Dry Plasma Etching
Dallaeva, Dinara, Prokopyeva, Elena, Tomanek, Pavel, Grmela, Lubomir, Ramazanov, ShikhgasanYear:
2014
DOI:
10.1109/isot.2014.76
File:
PDF, 384 KB
2014