[IEEE 2015 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) - Jinan, China (2015.10.30-2015.11.2)] 2015 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) - Experimental researches of a 3-DOF parallel micromanipulator driven by linear ultrasonic motors

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