SPIE Proceedings [SPIE SPIE'S 1993 Symposium on Microlithography - San Jose, CA (Sunday 28 February 1993)] Integrated Circuit Metrology, Inspection, and Process Control VII - Film thickness measurement of amorphous silicon
Clark, Wayne D., Keefer, Mark E., Cook, Dawn-Marie, Postek, Michael T.Volume:
1926
Year:
1993
Language:
english
DOI:
10.1117/12.148976
File:
PDF, 763 KB
english, 1993