SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Tuesday 18 October 1994)] Microelectronics Technology and Process Integration - Comparison study between tungsten and aluminum plug for submicrometer contact via manufacturing
Gn, Fang H., Liu, Lianjun, Guo, Michael, Chen, Fusen E., Murarka, Shyam P.Volume:
2335
Year:
1994
Language:
english
DOI:
10.1117/12.186049
File:
PDF, 792 KB
english, 1994